Anisotropic crystalline etch simulation able games
TY - ADVS. T1 - Anisotropic Crystalline Etching Simulation (ACES) software. AU - Liu, Chang. PY - Y1 - M3 - Software. ER -. A series of programs have been developed to model anisotropic etching of crystalline substances. The focus of this work was on the computation of the geometric offset surfaces for a given object, when the etching of different faces progresses at different rates depending of face orientation. defines etching properties for anisotropic crystal etching of silicon. The name ‘KOH_3’ is assigned to these properties so that they can be used (referred to) later on in the deck for performing the actual etching simulation. Those etching properties contain: the anisotropic etch rates for crystalline silicon.